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"Wavelength stabilization of MEMS Fabry-Pérot filters by capacitive ..."

Sebastian Lehmann, Norbert Neumann, Martin Ebermann (2017)

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DOI: 10.1109/ICSENS.2017.8234085

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-15

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  dblp key:
  - conf/ieeesensors/LehmannNE17
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Sebastian Lehmann, Norbert Neumann, Martin Ebermann:
Wavelength stabilization of MEMS Fabry-Pérot filters by capacitive sensing - Approach and experimental results. IEEE SENSORS 2017: 1-3

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