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"The effects of poly-SiGe on sensing properties for ultra-low-power ..."

Yoshihiko Kurui et al. (2017)

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DOI: 10.1109/ICSENS.2017.8233927

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-15

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  dblp key:
  - conf/ieeesensors/KuruiTFSKISS17
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  - https://dblp.org/rec/conf/ieeesensors/KuruiTFSKISS17
Yoshihiko Kurui, Hideyuki Tomizawa, Akira Fujimoto, Tomohiro Saito, Akihiro Kojima, Tamio Ikehashi, Yoshiaki Sugizaki, Hideki Shibata:
The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors. IEEE SENSORS 2017: 1-3

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