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"Liquid operating TPoS MEMS resonators with high quality factor."

Chang Han Je, Hyunjoong Lee, Yil Suk Yang (2019)

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DOI: 10.1109/SENSORS43011.2019.8956591

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-16

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  dblp key:
  - conf/ieeesensors/JeLY19
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  - https://dblp.org/rec/conf/ieeesensors/JeLY19
Chang Han Je, Hyunjoong Lee, Yil Suk Yang:
Liquid operating TPoS MEMS resonators with high quality factor. IEEE SENSORS 2019: 1-4

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