"Monolithic Vacuum Packaging for a CMOS MEMS Resonator Oscillator."

C. Y. Chang et al. (2024)

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DOI: 10.1109/SENSORS60989.2024.10784954

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type: Conference or Workshop Paper

metadata version: 2025-02-04

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C. Y. Chang, C. T. Hsin, Y. Z. Juang, S. H. Tseng:
Monolithic Vacuum Packaging for a CMOS MEMS Resonator Oscillator. IEEE SENSORS 2024: 1-4

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