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"Direct optical stress sensing in semiconductor manufacturing using Raman ..."

Martin De Biasio et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808575

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-15

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  dblp key:
  - conf/ieeesensors/BiasioKRBCLS16
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  - https://dblp.org/rec/conf/ieeesensors/BiasioKRBCLS16
Martin De Biasio, Martin Kraft, Michael Roesner, Christoph Bergmann, Maria Mercedes Cerezuela-Barreto, Dirk Lewke, Martin Schellenberger:
Direct optical stress sensing in semiconductor manufacturing using Raman micro-spectrometry. IEEE SENSORS 2016: 1-3

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