"High-Speed Wafer Temperature Control Approach of Step Chiller for ..."

Hyeonjun Yun et al. (2023)

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DOI: 10.1109/IECON51785.2023.10312511

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-25

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Hyeonjun Yun, Hyeseon Kwon, Sangsu Yeh, Minsu Lee, Jonghwa Kim, Yunha Kim, Seungwoo Cha, Mingu Kang, Jooyeop Nam:
High-Speed Wafer Temperature Control Approach of Step Chiller for Semiconductor Manufacturing Equipment. IECON 2023: 1-6

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