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"An acoustic set up for the vibration analysis of silicon wafers."

Stefan Mitterhofer, Jakob D. Pühringer, Viktor Schlosser (2013)

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DOI: 10.1109/IECON.2013.6700482

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-27

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  - conf/iecon/MitterhoferPS13
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Stefan Mitterhofer, Jakob D. Pühringer, Viktor Schlosser:
An acoustic set up for the vibration analysis of silicon wafers. IECON 2013: 8068-8073

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