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"Integrated MEMS actuators for sub-Micron patterning on thin polymer films."

Emad Mehdizadeh, Siavash Pourkamali (2014)

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DOI: 10.1109/IECON.2014.7048832

access: closed

type: Conference or Workshop Paper

metadata version: 2018-02-27

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Emad Mehdizadeh, Siavash Pourkamali:
Integrated MEMS actuators for sub-Micron patterning on thin polymer films. IECON 2014: 2357-2360

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