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"Sensor structures generated with combination of SU8 and PCBMEMS."

Stefan Gassmann et al. (2013)

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DOI: 10.1109/IECON.2013.6699119

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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  dblp key:
  - conf/iecon/GassmannLPQP13
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  - https://dblp.org/rec/conf/iecon/GassmannLPQP13
Stefan Gassmann, Antonio Luque, Francisco Perdigones, José M. Quero, Lienhard Pagel:
Sensor structures generated with combination of SU8 and PCBMEMS. IECON 2013: 108-112

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