"Analysis and Design for Inductively Coupled Plasma Power Source with ..."

Chenyue Chen, Jun Ma, Ming Liu (2024)

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DOI: 10.1109/IECON55916.2024.10905960

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type: Conference or Workshop Paper

metadata version: 2025-05-28

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Chenyue Chen, Jun Ma, Ming Liu:
Analysis and Design for Inductively Coupled Plasma Power Source with Multi-level Power Mode. IECON 2024: 1-6

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