"An Improved Meta Learning Approach for Optimizing Recipe Parameters for ..."

Zhen-Yin Annie Chen et al. (2023)

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DOI: 10.1109/IECON51785.2023.10312119

access: closed

type: Conference or Workshop Paper

metadata version: 2025-07-04

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Zhen-Yin Annie Chen, Chun-Cheng Lin, Ke-Wen Lu, Hui-Hsin Chin, Der-Jiunn Deng:
An Improved Meta Learning Approach for Optimizing Recipe Parameters for Semiconductor Processes. IECON 2023: 1-2

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