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"Modeling of silicon MEMS capacitive pressure sensor for biomédical ..."

Lakhdari Abdelghani et al. (2014)

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DOI: 10.1109/IDT.2014.7038625

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Lakhdari Abdelghani, MekkakiaMaaza Nasr-Eddine, Maamar Azouza, Bouguenna Abdellah, Kichene Moadh:
Modeling of silicon MEMS capacitive pressure sensor for biomédical applications. IDT 2014: 263-266

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