"Influence of Multilayer Design and Post-Deposition Processing on Effective ..."

Jarmila Müllerová et al. (2020)

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DOI: 10.1109/ICTON51198.2020.9203498

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Jarmila Müllerová, Pavel Sutta, Pavel Calta, Rostislav Medlín, Marie Netrvalová:
Influence of Multilayer Design and Post-Deposition Processing on Effective Photonic Properties of Silicon/Silicon Nitride Multilayer Structures. ICTON 2020: 1-4

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