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"Simulation for the Feasibility of IGZO Channel in 3D Vertical FeFET Memory ..."

Zhichao Du et al. (2023)

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DOI: 10.1109/ICTA60488.2023.10364316

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-17

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Zhichao Du, Chuanxue Sun, Xiaoyu Dou, Pengpeng Sang, Xuepeng Zhan, Chengji Jin, Jixuan Wu, Jiezhi Chen:
Simulation for the Feasibility of IGZO Channel in 3D Vertical FeFET Memory Based on TCAD. ICTA 2023: 51-52

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