"Coordinate measurement on wafer level - From single sensors to sensor arrays."

Thomas Krah et al. (2013)

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DOI: 10.1109/ICSENST.2013.6727726

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-28

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Thomas Krah, Achim Wedmann, Karin Kniel, Frank Härtig, N. Ferreira, Stephanus Büttgenbach:
Coordinate measurement on wafer level - From single sensors to sensor arrays. ICST 2013: 612-617

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