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"Reducing the probe ball diameters of 3D silicon-based microprobes for ..."

N. Ferreira et al. (2013)

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DOI: 10.1109/ICSENST.2013.6727663

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-28

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N. Ferreira, A. Brennecke, Andreas Dietzel, Stephanus Büttgenbach, Thomas Krah, David Metz, Karin Kniel, Frank Härtig:
Reducing the probe ball diameters of 3D silicon-based microprobes for dimensional metrology. ICST 2013: 301-306

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