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"Model-based control of a high-precision imprinting actuator for ..."
Tat Joo Teo et al. (2010)
- Tat Joo Teo, I-Ming Chen
, Choon Meng Kiew, Guilin Yang, Wei Lin:
Model-based control of a high-precision imprinting actuator for micro-channel fabrications. ICRA 2010: 3159-3164
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