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"Modeling of Haptic Sensing of Nanolithography with an Atomic Force Microscope."

Lo Ming Fok, Yun-Hui Liu, Wen Jung Li (2005)

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DOI: 10.1109/ROBOT.2005.1570479

access: closed

type: Conference or Workshop Paper

metadata version: 2017-08-30

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  dblp key:
  - conf/icra/FokLL05
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  - https://dblp.org/rec/conf/icra/FokLL05
Lo Ming Fok, Yun-Hui Liu, Wen Jung Li:
Modeling of Haptic Sensing of Nanolithography with an Atomic Force Microscope. ICRA 2005: 2446-2451

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