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"Multi-level modeling to OPC UA for migrating to Industry 4.0 in ..."
Fahad Rafique Golra, Selma Azaiez, Marc Engel (2020)
- Fahad Rafique Golra, Selma Azaiez, Marc Engel:
Multi-level modeling to OPC UA for migrating to Industry 4.0 in semiconductor manufacturing. ICPS 2020: 589-595
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