"Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data ..."

Mihai Patrascu, Stefano Stramigioli (2005)

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DOI: 10.1109/ICMENS.2005.112

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Mihai Patrascu, Stefano Stramigioli:
Stick-slip Actuation of Electrostatic Stepper Micropositioners for Data Storage - the µWalker. ICMENS 2005: 81-86

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