"Characterization and Analysis of Vertically Comb-driven Micromirrors."

Hsing-Yi Chung, Rongshun Chen (2005)

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DOI: 10.1109/ICMENS.2005.34

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Hsing-Yi Chung, Rongshun Chen:
Characterization and Analysis of Vertically Comb-driven Micromirrors. ICMENS 2005: 335-340

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