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"Patterning Nanometer Resist Features on Planar and Topography Substrates ..."
Khalil Arshak et al. (2005)
- Khalil Arshak, Stephen F. Gilmartin, Damian Collins, Olga Korostynska
, Arous Arshak:
Patterning Nanometer Resist Features on Planar and Topography Substrates Using The 2-Step NERIME FIB Top Surface Imaging Process. ICMENS 2005: 159-166
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