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"Study on Improvement of Settling Time for Pneumatic Servo Stage by ..."
Atsushi Yanagawa et al. (2019)
- Atsushi Yanagawa, Naoki Kishi, Takumi Ito, Tatsuya Yoshida, Shinya Hamada, Shinji Wakui:
Study on Improvement of Settling Time for Pneumatic Servo Stage by Reviewing Feedforward Compensation. ICM 2019: 146-151
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