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"Application of self-sensing technique for position control considering ..."

Kenta Seki, Makoto Iwasaki (2015)

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DOI: 10.1109/ICMECH.2015.7083988

access: closed

type: Conference or Workshop Paper

metadata version: 2019-06-05

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Kenta Seki, Makoto Iwasaki:
Application of self-sensing technique for position control considering vibration suppression in piezo-driven stage. ICM 2015: 278-289

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