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"Zirconium Oxide Dielectric Layer: Preparation and Characterization with ..."

Chih-Feng Yen, Shen-Hao Tsao, Yu-Ya Huang (2022)

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DOI: 10.1109/ICKII55100.2022.9983560

access: closed

type: Conference or Workshop Paper

metadata version: 2023-01-04

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Chih-Feng Yen, Shen-Hao Tsao, Yu-Ya Huang:
Zirconium Oxide Dielectric Layer: Preparation and Characterization with Various Volumes of Acetylacetone. ICKII 2022: 230-233

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