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"ALD ZrO2 processes for BEoL device applications."

Wenke Weinreich et al. (2014)

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DOI: 10.1109/ICICDT.2014.6838604

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  - https://dblp.org/rec/conf/icicdt/WeinreichSPRWTN14
Wenke Weinreich, Konrad Seidel, Patrick Polakowski, Stefan Riedel, Lutz Wilde, Dina H. Triyoso, Mark G. Nolan:
ALD ZrO2 processes for BEoL device applications. ICICDT 2014: 1-4

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