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"Characterization of high pressure hydrogen annealing effect on polysilicon ..."
Manh-Cuong Nguyen et al. (2016)
- Manh-Cuong Nguyen, An Hoang-Thuy Nguyen, Jae-Won Choi, Soo-Yeun Han, Jung-Yeon Kim, Rino Choi
, Changhwan Choi:
Characterization of high pressure hydrogen annealing effect on polysilicon channel field effect transistors using isothermal deep level trap spectroscopy. ICICDT 2016: 1-4
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