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"BEOL-compatible Ta/HZO/W Ferroelectric Tunnel Junction with Low Operating ..."

Leming Jiao et al. (2022)

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DOI: 10.1109/ICICDT56182.2022.9933091

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-19

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Leming Jiao, Zuopu Zhou, Zijie Zheng, Yuye Kang, Chen Sun, Qiwen Kong, Xiaolin Wang, Dong Zhang, Gan Liu, Long Liu, Xiao Gong:
BEOL-compatible Ta/HZO/W Ferroelectric Tunnel Junction with Low Operating Voltage Targeting for Low Power Application. ICICDT 2022: 5-7

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