"Smart Cut™ technology: from Substrate Enginnering to ..."

Guillaume Besnard, Bich-Yen Nguyen, Christophe Maleville (2022)

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DOI: 10.1109/ICICDT56182.2022.9933105

access: closed

type: Conference or Workshop Paper

metadata version: 2022-11-16

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Guillaume Besnard, Bich-Yen Nguyen, Christophe Maleville:
Smart Cut^™ technology: from Substrate Enginnering to Advanced 3D Integration. ICICDT 2022: 81-83

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