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"Proposal for a rotary micromotor structure based on CMOS-MEMS technology."
Luis Sánchez-Márquez et al. (2020)
- Luis Sánchez-Márquez, Mario Alfredo Reyes-Barranca, Griselda Stephany Abarca-Jimenez, Andrea López-Tapia, Luis Martín Flores-Nava:
Proposal for a rotary micromotor structure based on CMOS-MEMS technology. CCE 2020: 1-6
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