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"A set of test structures for the development of a CMOS-MEMS technology."
Carlos Ramón Báez Álvarez et al. (2016)
- Carlos Ramón Báez Álvarez, Mónico Linares Aranda, Alfonso Torres-Jácome, Wilfrido Calleja Arriaga
, Javier de la Hidalga Wade:
A set of test structures for the development of a CMOS-MEMS technology. CCE 2016: 1-6
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