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"FEM simulation of SAW H2 gas sensor based on Pd/AlN/Si multilayer structure."

Hai Ha Nguyen et al. (2023)

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DOI: 10.1109/ICCAIS59597.2023.10382243

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-09

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  - conf/iccais/NguyenNNDH23
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Hai Ha Nguyen, Hung Vy Nguyen, Minh Hieu Nguyen, Nhan Hiep Dong, Hoang Si Hong:
FEM simulation of SAW H2 gas sensor based on Pd/AlN/Si multilayer structure. ICCAIS 2023: 145-150

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