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"Noncyclic Scheduling of Multi-cluster Tools with Multi-type Wafers Based ..."

Yuanyuan Yan et al. (2021)

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DOI: 10.1109/ICCAE51876.2021.9426127

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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Yuanyuan Yan, Qinghua Tao, Huangang Wang, Wenhui Fan:
Noncyclic Scheduling of Multi-cluster Tools with Multi-type Wafers Based on Pareto Optimization. ICCAE 2021: 95-99

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