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"DSA-compliant routing for two-dimensional patterns using block copolymer ..."

Yu-Hsuan Su, Yao-Wen Chang (2016)

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DOI: 10.1145/2966986.2967025

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Yu-Hsuan Su, Yao-Wen Chang:
DSA-compliant routing for two-dimensional patterns using block copolymer lithography. ICCAD 2016: 50

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