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"Modeling of MEMS Micro-Mirror Using Input-output Data."

Yonghong Tan et al. (2019)

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DOI: 10.1109/ICCA.2019.8899922

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-10

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Yonghong Tan, Qingmei Cao, Ruili Dong, Qingyuan Tan, Xiang Chen:
Modeling of MEMS Micro-Mirror Using Input-output Data. ICCA 2019: 1207-1211

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