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"Modeling with hierarchical Petri net of semiconductor manufacturing system."

Huang Dan, Yan Juanwei, Qiao Fei (2004)

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DOI: 10.1109/ICARCV.2004.1469775

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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Huang Dan, Yan Juanwei, Qiao Fei:
Modeling with hierarchical Petri net of semiconductor manufacturing system. ICARCV 2004: 2217-2222

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