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"Properties of epitaxial AlN thin film deposited on sapphire substrate by ..."

Satoru Kaneko et al. (2013)

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DOI: 10.1109/ICAIT.2013.6621498

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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  - conf/icait/KanekoIYKTATNSPT13
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  - https://dblp.org/rec/conf/icait/KanekoIYKTATNSPT13
Satoru Kaneko, Takeshi Ito, Manabu Yasui, Masahito Kurouchi, Hironori Torii, Takao Amazawa, Takashi Tikumasu, Takatoshi Nagano, Lee Seughwan, Sungkyun Park, Hirofumi Takikawa:
Properties of epitaxial AlN thin film deposited on sapphire substrate by ECR plasma. ICAIT 2013: 69-70

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