"Effect of Charge Injection due to ESD on the Operation of MEMS."

William D. Greason (2007)

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DOI: 10.1109/07IAS.2007.331

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-06

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William D. Greason:
Effect of Charge Injection due to ESD on the Operation of MEMS. IAS 2007: 2188-2193

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