"Lot Release Control Using Genetics Based Machine Learning in a ..."

Ryohei Takasu et al. (2006)

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type: Conference or Workshop Paper

metadata version: 2006-09-07

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Ryohei Takasu, Nobutada Fujii, Kanji Ueda, Motohiro Kobayashi:
Lot Release Control Using Genetics Based Machine Learning in a Semiconductor Manufacturing System. IAS 2006: 497-504

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