"On-wafer probe station for microwave metrology at the nanoscale."

Abdelhatif El Fellahi et al. (2015)

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DOI: 10.1109/I2MTC.2015.7151582

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-09

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Abdelhatif El Fellahi, Kamel Haddadi, Jaouad Marzouk, Steve Arscott, Christophe Boyaval, Tuami Lasri, Gilles Dambrine:
On-wafer probe station for microwave metrology at the nanoscale. I2MTC 2015: 1960-1964

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