"Design of a fast, high-resolution sensor evaluation platform applied to a ..."

Lisa-Marie Faller, Juliana Padilha Leitzke, Hubert Zangl (2017)

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DOI: 10.1109/I2MTC.2017.7969660

access: closed

type: Conference or Workshop Paper

metadata version: 2020-09-05

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Lisa-Marie Faller, Juliana Padilha Leitzke, Hubert Zangl:
Design of a fast, high-resolution sensor evaluation platform applied to a capacitive position sensor for a micromirror. I2MTC 2017: 1-6

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