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"An Automatic Insertion Scheme of Extra Via for DSA-MP Hybrid Lithography."
Yuqin Wang et al. (2024)
- Yuqin Wang, Cheng Guo, Xiaojing Su, Xin Hong, Zixi Liu, Xiaohuan Ling, Bojie Ma, Pengyu Ren, Yujie Jiang, Yajuan Su, Yayi Wei:
An Automatic Insertion Scheme of Extra Via for DSA-MP Hybrid Lithography. ACM Great Lakes Symposium on VLSI 2024: 520-524
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