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"Impact of dummy filling techniques on interconnect capacitance and ..."

Arthur Nieuwoudt, Jamil Kawa, Yehia Massoud (2008)

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DOI: 10.1145/1366110.1366148

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Arthur Nieuwoudt, Jamil Kawa, Yehia Massoud:
Impact of dummy filling techniques on interconnect capacitance and planarization in nano-scale process technology. ACM Great Lakes Symposium on VLSI 2008: 151-154

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