"Process Modeling of Dynamics-Driven Structural Design of High-Tech ..."

Xin Luo, Chengyuan Liang, Xuedong Chen (2014)

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type: Conference or Workshop Paper

metadata version: 2023-07-04

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Xin Luo, Chengyuan Liang, Xuedong Chen:
Process Modeling of Dynamics-Driven Structural Design of High-Tech Semiconductor Fabrication Equipment. GI-Jahrestagung 2014: 2019-2024

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