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"Correlation between Low Polarization and Roughness in Low-k SiOC Thin ..."

Teresa Oh (2011)

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DOI: 10.1007/978-3-642-27180-9_19

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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  - conf/fgit/Oh11
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Teresa Oh:
Correlation between Low Polarization and Roughness in Low-k SiOC Thin Films by Chemical Vapor Deposition. FGIT-GDC 2011: 155-160

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