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"Simulation features of diffusion doping process by means of software ..."

N. L. Lagunovich, V. M. Borzdov, Arkady Turtsevich (2013)

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DOI: 10.1109/EWDTS.2013.6673112

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  dblp key:
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  - https://dblp.org/rec/conf/ewdts/LagunovichBT13
N. L. Lagunovich, V. M. Borzdov, Arkady Turtsevich:
Simulation features of diffusion doping process by means of software package of synopsys company. EWDTS 2013: 1-3

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