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"A bottom-inlet type MEMS acoustic sensor with wheel-shaped back-plate anchor."
Jaewoo Lee et al. (2013)
- Jaewoo Lee, C. H. Je, Woo-Seok Yang, Jongdae Kim:
A bottom-inlet type MEMS acoustic sensor with wheel-shaped back-plate anchor. EUROCON 2013: 2116-2122
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