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"Motion Measurement Methods for Nonlinear Analysis of Electrostatic MEMS ..."
Mehdi Ghommem et al. (2023)
- Mehdi Ghommem, Basil Alattar, Michael Lherbette, Alaaeldin Elhady, Eihab M. Abdel-Rahman:
Motion Measurement Methods for Nonlinear Analysis of Electrostatic MEMS Resonators. EUROCON 2023: 632-637
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