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"Towards on-line testing of MEMS using electro-thermal excitation."
Frédérick Mailly et al. (2005)
- Frédérick Mailly
, Florence Azaïs, Norbert Dumas, Laurent Latorre, Pascal Nouet:
Towards on-line testing of MEMS using electro-thermal excitation. ETS 2005: 76-81
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