BibTeX record conf/etfa/FatikowEBK13

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@inproceedings{DBLP:conf/etfa/FatikowEBK13,
  author    = {Sergej Fatikow and
               Volkmar Eichhorn and
               Malte Bartenwerfer and
               Florian Krohs},
  editor    = {Carla Seatzu},
  title     = {Nanorobotic {AFM/SEM/FIB} system for processing, manipulation and
               characterization of nanomaterials},
  booktitle = {Proceedings of 2013 {IEEE} 18th Conference on Emerging Technologies
               {\&} Factory Automation, {ETFA} 2013, Cagliari, Italy, September
               10-13, 2013},
  pages     = {1--4},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/ETFA.2013.6648143},
  doi       = {10.1109/ETFA.2013.6648143},
  timestamp = {Wed, 16 Oct 2019 14:14:55 +0200},
  biburl    = {https://dblp.org/rec/conf/etfa/FatikowEBK13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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